Dissemination Activities

Dissemination of the project results is of great importance for the project effectiveness and impact both on scientific community and on society. The results of the work performed within the project will be published in international-level peer-reviewed journals and all the partners participate to national and international conferences in the fields of nanoelectronics, nanofabrication, simulation of semiconductor processes and low-power semiconductor devices.



IONS4SET Newsletters

The target of the IONS4SET project was the preparation of Single Electron Transistors (SETs) consisting of vertical nanopillars with extremely reduced diameter (10 nm), made from a proper stack for the suitable preparation of Si/SiO2 quantum dots by ion beam mixing and annealing. Now, more than four years have passed, and many goals have been achieved: follow us in their description through IONS4SET Newsletters!  May 2020 and June 2020 newsletters are now available, just left-click on the reference images below.

IONS4SET Newsletter #1IONS4SET Newsletter #2


IONS4SET Publications

- F. Djurabekova, C. Fridlund and K. Nordlund, Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures, Phys. Rev. Materials 4, 013601 (2020)

- E. Amat, A. del Moral, M, Fernández-Regúlez, L. Evangelio, M. Lorenzoni, A. Gharbi, G. Rademaker, M.-L. Pourteau, R. Tiron, J. Bausells and F. Perez-Murano, Exploring Strategies to Contact 3D Nano-Pillars, Nanomaterials 10, 716 (2020)

- X. Xu, K.-H. Heinig, W. Möller, H.-J. Engelmann, N. Klingner, A. Gharbi, R. Tiron, J. von Borany, G. Hlawacek, Morphology modification of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm, Semicond. Sci. Technol. 35, 015021 (2020)

- F.E. Caligiore, D. Nazzari, E. Cianci, K. Sparnacci, M. Laus, M. Perego, G. Seguini, Effect of the density of reactive sites in P(S-r-MMA) film during Al2O3 growth by Sequential Infiltration Synthesis, Adv. Mater. Interfaces 6, 1900503 (2019)

- F. J. Klüpfel, A Compact Model Based on Bardeenís Transfer Hamiltonian Formalism for Silicon Single Electron Transistors , IEEE Access 7, 84053 (2019)

- T. Prüfer, W. Möller, K.-H. Heinig, D. Wolf, H.J. Engelmann, X.M. Xu, J. von Borany, Computer modeling of single-layer nanocluster formation in a thin SiO2 layer buried in Si by ion mixing and thermal phase decomposition, J. Appl. Phys. 125, 225708 (2019)

- E. Amat, A. Del Moral, J. Bausells, F. Perez-Murano, F. Klüpfel, Quantum dot location relevance into SET-FET circuits based on FinFET devices, Proc. 33rd Conf. on Design of Circuits and Integrated Systems (DCIS-2018), Article 8681478, April 2019

- E. Amat, F. Klüpfel, J. Bausells, Influence of quantum dot characteristics on the performance of hybrid SET-FET circuits, IEEE Trans. Electron Devices 66, 4461 (2019)

- A. Gharbi, P. Pimenta-Barros, O. Saouaf, G. Reynaud, L. Pain, R. Tiron, C. Navarro, C. Nicolet, I. Cayrefourcq, M. Perego, F. Pérez-Murano, E. Amat and M. Fernández-Regúlez, Pillars fabrication by DSA lithography: material and process options , Adv. Pattern Mater. Proc. XXXV, 105860Q (2018)

- X. Xu, T. Prüfer, D. Wolf, H.-J. Engelmann, L. Bischoff, R. Hübner, K.-H. Heinig, W. Möller, S. Facsko, J. von Borany and G. Hlawacek, Site-controlled formation of single Si nanocrystals in a buried SiO2 matrix using ion beam mixing , Beilstein J. Nanotechnol. 9, 283 (2018)

- F. Delachat, A. Gharbi, P. Pimenta-Barros, A. Fouquet, G. Claveau, N. Posseme, L. Pain, C. Nicolet, C. Navarro, I. Cayrefourcq and R. Tiron, An embedded neutral layer for advanced surface affinity control in grapho-epitaxy directed self-assembly , Nanoscale 10, 10900 (2018)

- E. Cianci, D. Nazzari, G. Seguini, M. Perego, Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation , Advanced Materials Interfaces 5, 1801016 (2018)

- G. Seguini, F. Zanenga, M. Laus, and M. Perego, Ordering kinetics in two-dimensional hexagonal pattern of cylinder-forming PS-b-PMMA block copolymer thin films: Dependence on the segregation strength , Phys. Rev. Materials 2, 055605 (2018)

- S. Zhang, O.H. Pakarinen, M. Backholm, F. Djurabekova, K. Nordlund, J. Keinonen and T.S. Wang, Absence of single critical dose for the amorphization of quartz under ion irradiation , J. Phys.: Condens. Matter 30, 015403 (2018)

- E. Amat, R. Canal, A. Calomarde and A. Rubio, Review on suitable eDRAM configurations for next nano-metric electronics era , International Journal of the Society of Materials Engineering for Resources 23, 22 (2018)

- E. Amat, J. Bausells and F. Perez-Murano, Exploring the Influence of Variability on Single-Electron Transistors Into SET-Based Circuits , IEEE Trans. Electron Dev. 64, 5172 (2017)

- F.J. Klüpfel and P. Pichler, 3D Simulation of Silicon-Based Single-Electron Transistors , Proc. 22nd Intern. Conf. on Simulation of Semiconductor Processes and Devices (SISPAD 2017), 77 (2017)

- P. Pimenta-Barros, A. Gharbi, A. Fouquet, S. Bos, J. Hazart, F. Delachat, X. Chevalier, I. Cayrefourcq, L. Pain and R. Tiron, Balancing Block Copolymer Thickness over Template Density in Graphoepitaxy Approach , Macromolecular Materials and Engineering 302, 1700285 (2017)

- C. Fridlund, J. Laakso, K. Nordlund and F. Djurabekova, Atomistic simulation of ion irradiation of semiconductor heterostructures , Nucl. Instr. Meth. Phys. Res. B409, 14 (2017)

- E. Amat, J. Bausells and F. Perez-Murano, Exploring the Influence of Variability on Single-Electron Transistors Into SET-Based Circuits , IEEE Transactions on Electron Devices PP, 1 (2017)

- J. Frascaroli, E. Cianci, S. Spiga, G. Seguini, and M. Perego, Ozone-based sequential infiltration synthesis of Al2O3 nanostructures in symmetric block copolymer, ACS Appl. Mater. Interfaces 8, 33933 (2016)

- F.J. Klüpfel, A. Burenkov, and J. Lorenz, Simulation of silicon-dot-based single-electron memory devices, Proc. 21st Intern. Conf. on Simulation of Semiconductor Processes and Devices (SISPAD 2016), 237 (2016)

- K. Nordlund, F. Djurabekova and G. Hobler, A large fraction of crystal directions leads to ion channeling, Phys. Rev. B 94, 214109 (2016)

- S. Ilday, F.Ö. Ilday, R. Hübner, Ty J. Prosa, I. Martin, G. Nogay, I. Kabacelik, Z. Mics, M. Bonn, D. Turchinovich, H. Toffoli, D. Toffoli, D. Friedrich, B. Schmidt, K.-H. Heinig, R. Turan, Multiscale Self-Assembly of Silicon Quantum Dots into an Anisotropic Three-Dimensional Random Network, Nano Letters 16, 1942 (2016)


IONS4SET Conference Contributions


IONS4SET was present at past conferences with the following contributions:


- K.H. Heinig, G. Hlawacek, H.-J. Englmann, T. Prüfer, X. Xu, W. Möller, L. Bischoff, A. Gharbi, R. Tiron, M. Rommel, and J. von Borany, CMOS-compatible single Si quantum dot fabrication in a SiO2 layer sandwiched in a Si nanopillar for a room temperature single electron transistor, EMSR Fall Meeting, Symposium XX, 16.-19.09.2019, Warsaw, Poland. (Talk)

- K.-H. Heinig, H.-J. Engelmann, A. Gharbi, R. Tiron, T. Prüfer, and J. von Borany, Dramatic SiO2 thickness reduction by reactive ion etching of nanopillars from Si/SiO2/Si stacks, EMSR Fall Meeting, Symposium XX, 16.-19.09.2019, Warzaw, Poland. (Talk)

- J. von Borany, K.-H. Heinig, H.-J. Engelmann, R. Tiron, A. Gharbi, M. Belli, M. Rommel, and F. Perez-Murano, Towards room-temperature operating single-electron-transistors: Fabrication and characterization of stacked Si/SiO2/Si nanopillars with Si nanodots, EUROMAT-2019 Symposium C11: Processes and Materials for Nanoelectronics, 3.09.2019, Stockholm, Sweden. (Talk)

- F. Klüpfel, E.Amat, H.J. Engelmann, and P. Pichler, Gate design of nanopillar single-electron transistors, EUROMAT-2019 Symposium C11: Processes and Materials for Nanoelectronics, 3.09.2019, Stockholm, Sweden. (Talk)

- C. Fridlund, R. Toijala, K. Nordlund, and F Djurabekova, Adaptive speed-up model for simulating ion cascades with molecular dynamics, EUROMAT-2019 Symposium C11: Processes and Materials for Nanoelectronics, 3.09.2019, Stockholm, Sweden. (Poster)

- L. Bischoff, K.-H. Heinig, W. Möller, W. Pilz, N. Klingner, and J. von Borany, Nano-pillar evolution by FIB irradiation with heavy ions, Ion Beam Physics Workshop 2019, June 24 - 26, 2019, HZDR Dresden, Germany (Talk)

- E. Amat, A. del Moral, H-J. Engelmann, A. Gharbi, G. Rademaker, M-L. Porteau, R. Tiron, J. Bausells and F. Perez-Murano; Suitability of HSQ as fabrication material for vertical devices at nano-scale; Micro and Nano Engineering 2019 (MNE-2019); 23-26 September, Rhodes, Greece. (Talk)

- M.-L. Pourteau, A. Gharbi, P. Brianceau, J.-A. Dallery, F. Laulagnet, G. Rademaker, R. Tiron, J. von Borany, K.-H. Heinig, H.-J. Engelmann, M. Rommel, L. Baier, W. Lerch, and J. Niess; Sub-15 nm multilayer nanopillar patterning for hybrid SET/CMOS integration; Micro and Nano Engineering 2019 (MNE-2019); 23-26 September, Rhodes, Greece. (Talk)

- F. Perez-Murano, L. Evangelio, S. Gottlieb, M. Fernández-Regúlez, C. Pinto, E. Amat, A. del Moral and J. Bausells; Self-assembly methods for nanoelectronics; Nanospain Conference 2019, 28-31 May, Barcelona (Spain). (Invited)

- E. Amat, F. Klüpfel, J. Bausells and F. Perez-Murano; Benefits of matrix configuration to implement SET-FET circuit based on vertical topology; EUROSOI-ULIS 2019, 1-3 April, Grenoble (France). (poster)

- A. del Moral, E. Amat, J. Bausells and F. Perez-Murano; Vertical nanowire-based FET modelling and electrical optimization; EUROSOI-ULIS 2019, 1-3 April, Grenoble (France). (poster)

- X. Xu, K.-H. Heinig, W. Möller, A. Gharbi, R. Tiron, H.-J. Engelmann, L. Bischoff, T. Prüfer, R. Hübner, S. Facsko, G. Hlawacek, and J. von Borany, Towards a nanopillar-based single electron transistor – a high-temperature ion beam irradiation approach, 2018 MRS Fall Meeting and Exhibition, Symp. CM-05: Fundamentals of Materials Property Changes Under Irradiation, Nov 25-30, 2018, Boston, MA, USA (Talk)

- C. Fridlund, K. Nordlund, F. Djurabekova, Broad-beam simulations of Si ions in stacked Si/SiO2 heterostructures for meta-stable SiOx formation, 2018 MRS Fall Meeting and Exhibition, Symp. CM05: Fundamentals of Materials Property Changes Under Irradiation, Nov 25-30, 2018, Boston, MA, USA (Poster)

- X. Xu, G. Hlawacek, H.-J. Engelmann, K.-H.M Heinig, W. Möller, A. Gharbi, R. Tiron, L. Bischoff, T. Prüfer, R. Hübner, S. Facsko, and J. von Borany, Avoiding amorphization related shape changes of nanostructures during medium fluence ion beam irradiation of semiconductor materials, 65th AVS Intern. Symposium and Exhibition 2018, Oct 21-26, 2018, Long Beach CA, USA (Talk)

- P. Pimenta Barros, N. Posseme, S. Barnola, R. Tiron, A. Gharbi, M. Argoud, Z. Chalupa, M.-G. Gusmao-Cacho, A. Paquet, F. Delachat, C. Nicolet, and C. Navarro, DSA Patterning for and Beyond CMOS, 65th AVS Intern. Symposium and Exhibition 2018, Oct 21-26, 2018, Long Beach CA, USA (Invited Talk)

- K.H. Heinig, J. von Borany, K.-H. Stegemann, T. Prüfer, X. Xu, W. Möller, A. Gharbi, R. Tiron, F. Klüpfel, G. Hlawacek, L. Bischoff, H.-J. Engelmann, and S. Facsko, Manufacturability of single Si quantum dots for single electron transistors operating at room temperature, EMRS Fall Meeting, Symp. K: Nanomaterials – electronics & photonics, Sept 17-20, 2018, Warsaw, Poland (Invited Talk)

- K.-H. Heinig, J. von Borany, T. Prüfer, X. Xu, W. Möller, A. Gharbi, R. Tiron, G. Hlawa-cek, L. Bischoff, H.J. Engelmann, and S. Facsko, Combination of top-down and bottom-up processes to manufacture single electron transistors operation at RT, EMRS Fall Meeting, Symp. M: Organized nanostructures and nano-objects: fabrication, characterization and applications, Sept 17-20, 2018, Warsaw, Poland (Talk)

- T. Prüfer, D. Wolf, H.-J. Engelmann, R. Hübner, L. Bischoff, G. Hlawacek, K.-H. Heinig, S. Facsko, X. Xu, and J. von Borany, Si quantum dots for single electron transistors: Synthesis, characterization and theoretical comparison, EMRS Fall Meeting, Symp. L: Advances in nanoparticles: synthesis, characterization, theoretical modelling, and applications, Sept 17-20, 2018, Warsaw, Poland (Talk, Students Award)

- T. Prüfer, K.-H. Heinig, and W. Möller, Atomistic simulations to design a room temperature single electron transistor, EMRS Fall Meeting 2018, Symp. I: Atomic-scale design protocols towards energy, electronic, catalysis and sensing applications, Sept 17-20, 2018, Warsaw, Poland (Talk)

- M. Perego, G. Seguini, E. Cianci, E. Amat, M. Fernadez-Regulez, S. Gottlieb, F. Perez-Murano, A. Gharbi, P. Pimenta-Barros, L. Pain, and R. Tiron, Al2O3 pillars obtained by sequential infiltration synthesis in directed self-assembled block copolymers, EMRS Fall Meeting 2018, Sept 17-20, 2018, Warsaw, Poland (Talk)

- E. Cianci, D. Nazzari, G. Seguini, F.E. Caligiore, M. Perego, K. Sparnacci, V. Gianotti, and M. Laus, Time-resolved investigation of Al2O3 growth in P(S-r-MMA) thin films during sequential infiltration synthesis, EMRS Fall Meeting 2018, Sept 17-20, 2018, Warsaw, Poland (Poster)

- K.-H. Heinig, Ion irradiation for nanoelectronics: nm-scale structures by mixing and phase separation, 22nd Intern. Conference on Ion Implantation Technology (IIT-2018), Sept 16-21, 2018, Würzburg, Germany (Invited Talk)

- E. Cianci, D. Nazzari, G. Seguini, and M. Perego, Sequential infiltration synthesis in PS and PMMA thin films: an in-situ spectroscopic ellipsometry investigation, EMRS Fall Meeting 2018, Sept 17-20, 2018, Warsaw, Poland (Poster)

- G. Seguini, F. Zanenga, G. Cannetti, M. Laus, and M. Perego, Ordering kinetic in two-dimensional hexagonal pattern of cylinder-forming PS-b-PMMA block copolymer thin films: dependence on the segregation strength, EMRS Fall Meeting 2018, Sept 17-20, 2018, Warsaw, Poland (Poster)

- C. Fridlund, J. Laakso, K. Nordlund, A. Lopez, F. Djurabekova, W. Möller, K-H. Heinig, Accelerated molecular dynamics for ion beam mixing in semiconductor heterostructures, IBMM, June 24-29, 2018, San Antonio, Texas, USA (Talk)

- J. von Borany, K.-H. Heinig on behalf of the IONS4SET consortium, Ion-irradiation-assisted Si nanodot self-assembly for single electron transistors, EMRS Spring Meeting, Symp. M: Block-copolymer self-assembly: fundamentals and applications, June 18-22, 2018, Strasbourg, France (Talk)

- C. Fridlund, K. Nordlund, and F. Djurabekova, Analysis of defect formation in high-fluence ion mixing in Si-SiO2 nanolayers, EMRS Spring Meeting 2018, Symp. K: Defect-induced effects in nanomaterials, June 18-22, 2018, Strasbourg, France (Talk)

- F. Ferrarese, T.J. Giammaria, A. Miti, G. Zuccheri, S. Carignaro, N. De Leo, M. Perego, and M. Laus, Dewetting induced BCP ordering on chemically patterned substrates by laser writer lithography, EMRS Spring Meeting 2018, Symp. M: Block-copolymer self-assembly: fundamentals and applications, June 18-22, 2018, Strasbourg, France (Talk)

- A. Paquet, A. Gharbi, C. Navarro, C. Nicolet, X. Chavalier, K. Sakavuyi, K. Xu, L. Pain, I. Cayrefourcq, and R. Tiron, Selective grafting study for a chemo-epitaxy DSA process application, EMRS Spring Meeting 2018, Symp. M: Block-copolymer self-assembly: fundamentals and applications, June 18-22, 2018, Strasbourg, France (Talk)

- G. Seguini, F. Zanenga, M. Laus, and M. Perego, Ordering kinetic in two-dimensional hexagonal pattern of cylinder-forming PS-b-PMMA block copolymer thin films: dependence on the segregation strength, EMRS Spring Meeting 2018, Symp. M: Block-copolymer self-assembly: fundamentals and applications, June 18-22, 2018, Strasbourg, France (Talk)

- E. Cianci, D. Nazzari, G. Seguini, and M. Perego, Time-resolved investigation of TMA diffusion process in PMMA thin films during SIS by in-situ spectroscopic ellipsometry, EMRS Spring Meeting, Symp. M: Block-copolymer self-assembly: fundamentals and applications, June 18-22, 2018, Strasbourg, France (Talk)

- E. Cianci, D. Nazzari, G. Seguini, F.E. Caligiore, M. Perego, K. Sparnacci, V. Gianotti, M. Laus, Time-resolved investigation of Al2O3 growth in P(S-r-MMA) thin films during sequential infiltration synthesis, EMRS Spring Meeting 2018, Symp. M: Block-copolymer self-assembly: fundamentals and applications, June 18-22, 2018, Strasbourg, France (Poster)

- C. Fridlund, K. Nordlund, F. Djurabekova, Molecular dynamics simulations of ion beam induced atom mixing in Si/SiO2 structures using different potential models, COSIRES, June 18-22, 2018, Shanghai, China (Talk)

- W. Möller, K.-H. Heinig, X. Xu, and T. Prüfer, Binary collisional computer simulation of FIB-induced erosion and atomic mixing in nanostructures, 2nd HeFIB Conference, June 11-13, 2018, Dresden, Germany (Talk)

- X. Xu, T. Prüfer, D. Wolf, R. Hübner, L. Bischoff, H.-J. Engelmann, A. Gharbi, K.-H. Heinig, G. Hlawacek, and J, von Borany, Site-controlled Si nanodot formation for a RT-SET via ion beam mixing and phase separation, 2nd HeFIB Conference, June 11-13, 2018, Dresden Germany (Talk)

- C. Fridlund, K. Nordlund and F. Djurabekova, "Quantum dot synthesis by Ion Beam Mixing in Si/SiO2/Si heterostructured nanopillars", REI-19, 19th International Conference on Radiation Effects in Insulators", 2-7.07.2017, Versailles, France

- M. Belli, M. Alia, S. Paleari, X. Xu, C. Laviron, A. Gharbi, M. Rommel, F. Stumpf, T. Prüfer, D. Wolf, L. Bischoff, R. Hübner, G. Hlawacek, S. Facsko, K.-H. Heinig, J. von Borany, M. Fanciulli, "Electrical characterization of Si nanocrystal devices suitable for RT-SET operation", EUROMAT 2017, European Congress and Exhibition on Advanced Materials and Processes, 17-22.09.2017, Thessaloniki, Greece

- E. Amat, J. Bausells and F. Perez-Murano, Influence of Process-Voltage-Temperature variations on the behavior of a hybrid circuit FET-SET, CDE 2017, 8-10.09.2017, Barcelona, Spain

- "Nanopatterning2017" and "FOR3NANO" (the 9th International Workshop on Nanoscale Pattern Formation at Surfaces, and the new workshop on Formation of 3D Nanostructures by Ion Beams), Helsinki, Finland, 26-30 June, 2017 (pictures available)

- C. Fridlund, K. Nordlund, and F. Djurabekova, Influence of Process-Voltage-Temperature variations on the behavior of a hybrid circuit FET-SET, TRNM IX, Towards Reality in Nanoscale Materials IX, 13-16.02.2017, Levi, Finland

- C. Fridlund, K. Nordlund, and F. Djurabekova, Simulations of Ion-Beam Induced Atom-Mixing over Si/SiO2-Interfaces for Preparation of Concentration Profiles, Physics Days 2017, 22-24.03.2017, Helsinki, Finland

- F. Djurabekova et al.; Formation of meta-stable SiOx by ion beam mixing for self-assembly of a single quantum dot; 20th Intern. Conf. on Ion Beam Modification of Materials (IBMM 2016), 30.10.-4.11.2016 Wellington, New Zealand (Poster)

- K.H. Heinig, S. Facsko, K.H. Stegemann, T. Pruefer, X. Xu, G. Hlawacek, R. Huebner, D. Wolf, L. Bischoff, W. Moeller and J. von Borany; Ion irradiation assisted fabrication of Si quantum dots for ultra-low power electronics; 20th Intern. Conf. on Ion Beam Modification of Materials (IBMM 2016), 30.10.-4.11.2016 Wellington, New Zealand (Invited Talk)

- M. Perego et al.; Sequential infiltration synthesis of oxide nanostructures in block co-polymer based templates using ozone as oxygen precursor, 2nd Int. Symposium on Directed-Self-Assembly (DSA 2016), 11-13.10.2016, Grenoble (France) (Talk)

- A. Gharbi, F. Delachat, P. Pimenta Barros, M. Argoud, G. Chamiot-Maitral, S. Bouanani, S. Bos, C. Lapeyre, C. Monget, X. Chevalier, C. Nicolet, C. Navarro, I. Cayrefourcq, L. Pain, and R. Tiron, Defectivity monitoring for DSA contact hole application, 2nd DSA Symposium, 11-13.10.2016, Grenoble, France (Talk)

- K.H. Heinig for the IONS4SET consortium; Ion-irradiation-induced Si nanodot self-assembly for hybrid SET-CMOS technology, 5th Korea-EU NanoWorkshop, 6.10.2016, Seoul, South Korea (Invited talk)

- M. Fanciulli, S. Paleari, M. Belli, and A. Lamperti; Silicon nanowires: donors, surfaces and interface defects, PRiME-ECS 2016, 2-7.10.2016, Honolulu (USA) (Talk)

- J. Kelling, G. Ódor, K-H. Heinig, M. Weigel, S. Gemming; Pushing the Limits of Lattice Monte-Carlo Simulations using GPUs; Int. Conf. Perspectives of GPU computing in Science, 26.-28.9.2016, Roma, Italy (Invited Talk)

- K.H. Heinig, K.H. Stegemann, J. von Borany, S. Facsko, G. Hlawacek, R. Hübner, L. Bischoff, W. Möller, T. Prüfer, and X. Xu; Self-assembly of single Si quantum dots in SiO2, EMRS-Fall 2016, Symposium E, 22.09.2016, Warszawa, Poland (Talk)

- M. Fanciulli, M. Belli, S. Paleari; Electron spin relaxation and coherence in silicon, EMRS-Fall 2016, Symposium A, 21.09.2016, Warszawa, Poland (Talk)

- E. Amat, J. Bausells, F. Perez-Murano; Exploring an improvement SET-FET hybrid behavior by using different FET types; MNE2016, 42nd Conf. Micro and Nano Engineering 2016, 20.09.2016, Vienna, Austria (Talk)

- J. Kelling, K.H. Heinig and S. Gemming; Experimental-scale kinetic lattice Monte-Carlo studies on GPU, EMRS-Fall 2016, Symposium U, 20.09.2016, Warszawa, Poland (Talk)

- M. Perego, G. Seguini, E. Cianci, J. Frascaroli, M.Ceresoli, and S. Spiga; Sequential infiltration synthesis of oxide nanostructures in block copolymer based templates using ozone as oxygen precursor, EMRS Fall 2016, Symposium E, 19.09.2016, Warsaw (Poland) (Talk)

- C. Fridlund, K. Nordlund, F. Djurabekova, T. Prüfer, and K.H. Heinig; Formation of metastable SiOx in a 3D nanoscale volume by ion beam mixing for self-assembly of a single Si quantum dot, EMRS-Fall 2016, Symposium U, 19.09.2016, Warszawa, Poland (Talk)

- T. Prüfer, W. Möller and K.H. Heinig; Atomistic scale simulations of Si quantum dot self-assembly for single electron transistors, EMRS-Fall 2016, Symposium U, 19.09.2016, Warszawa, Poland (Talk)

- F.J. Klüpfel, A. Burenkov, and J. Lorenz; Simulation of silicon-dot-based single-electron memory devices, Intern. Conf. on Simulation of Semiconductor Processes and Devices (SISPAD-2016), 7.09.2016, Nuremberg, Germany (Poster)

- E. Cianci, J. Frascaroli, G. Seguini, S. Spiga, and M. Perego; Role of oxidant precursor on the sequential infiltration synthesis of Al2O3 in block copolymer films, ALD 2016, 26.07.2016, Dublin, Ireland (Talk)

- W. Möller; Collisional computer simulation of ion processing and ion-based analysis of nanostructures, 4th Dresden Nanoanalysis Symposium "Materials Modeling and Characterization", 15.06.2016, Dresden, Germany (Talk)

- S. Ilday, F. Ilday, R. Huebner, T. Prosa, I. Martin, G. Nogay, I. Kabacelik, Z. Mics, M. Bonn, D. Turchinovich, H. Toffoli, D. Toffoli, D. Friedrich, B. Schmidt, K.-H. Heinig, R. Turan; Multiscale Self-Assembly of Quantum Dots into an Anisotropic 3D Random Network; 2016 MRS Spring Meeting, 28.03.-01.04.2016, Phoenix, USA



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