IONS4SET Project Description

Project Organization

IONS4SET is organized WP Picture in six workpackages which closely and actively interact to address scientific and technological issues and achieve project goals. The core workpackages regard the fabrication of the devices at different scales, from the nano-sized quantum dots to the whole layout. Such workpackages receive feedback from the workpackages dealing with theoretical modeling/simulations, and with the electrical characterization of the devices. The activities are presented to the Industry Endorsement Group to foster integration. Finally, WP1 workpackage is important for the guidance of the scientific research and for the dissemination of the project results as papers, participation to conferences and organization of workshops.

In the following you can find the description of workpackage objectives, together with contact details.

WP1 is primarily dedicated to project exploitation and dissemination activities to enable Innovation (here: low-power electronics) relevant to tackle societal challenges based on the project results. This includes intense external communication, in particular with industry, and specific measures of dissemination. A task at the beginning is related to specification / benchmarking of structures and devices to be developed in the project. Besides, WP1 also includes all the specific functions assigned to the project coordinator to ensure that the project successfully achieves its stated objectives on time, within budget and with the expected high level of quality.

WP1 Partner Leader: HZDR
WP1 Contact: IONS4SET Coordinator Dr. Johannes von Borany, Tel: +49-351-260 3378, email:

WP2 deals with theoretical modelling and simulation of processes and devices. Its core activities are:
(i) Simulation support of technology development for silicon nanodot formation in thin SiO2 layers;
(ii) Evaluation of electrical performance of single-electron transistors based on silicon nanodots.

WP2 Partner Leader: FhG
WP2 Contact: Dr. Peter Pichler, Tel.: +49 9131 761 227, email:

The main objectives of WP3 workpackage are the structural, morphological as well as electrical and functional characterization of the nanostructures and devices produced within WP4, WP5, and WP6. The data obtained by the structural and electrical characterization will be also compared with those obtained by the simulation and modelling activities (WP2).

WP3 Partner Leader: CNR
WP3 Contact: Matteo Belli, Tel.: +39 039 603 6369 (CNR), email:

WP4 is involved in the ion irradiation processes at the basis of the self-assembly preparation of silicon nanodots. The workpackage core activities are:
(i) Optimization of the pathway of Si nanodot self-assembly using the Helium Ion Microscope (parameters of ion irradiation and thermal treatments, layer thicknesses, …);
(ii) Broad-beam ion-irradiation induced Si nanodot assembly in pillars for hybrid SET-CMOS demonstrator-device fabrication.

WP4 Partner Leader: HZDR
WP4 Contact: Dr. Karl-Heinz Heinig, Tel.: + 49 351 260 3288, email:

WP5 will perform the realisation of 10 nm nanopillar array on embedded thin oxide layer (6 nm). The work includes the lithography and associated etch process steps. The WP will develop integration flows compatible with industry standard. Regarding the resolution aggressiveness, two lithography options will be investigated:
(i) Electron beam lithography;
(ii) Directed self-assembly, whereas both approaches will be benchmarked.

WP5 Partner Leader: LETI
WP5 Contact: Guido Rademaker, email:

The objectives of WP6 mainly regard integration issues:
(i) To develop processes and methods for the integration of SET devices into CMOS circuits that can later be transferred to an industrial foundry;
(ii) To demonstrate that these processes and methods are CMOS compatible by characterizing the proper operation of SET devices integrated in CMOS circuits.

WP6 Partner Leader: CSIC
WP6 Contact: Dr. Francesc Perez-Murano, email:

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