Consiglio Nazionale delle Ricerche - Institute for Microelectronics and Microsystems

MDM logo The MDM Laboratory belongs to the Institute for Microelectronics and Microsystems (IMM) of the National Research Council (CNR). The Laboratory is located in the ST Microelectronics and Micron site in Agrate Brianza, Milan, Italy, two of the major microelectronic enterprises in the world. The CNR-IMM MDM Laboratory is a state-of-the-art facility focused on the investigation of the structural, electrical, optical and magnetic properties of materials for present and future nano-electronics, spintronics, and neuroelectronics. Available facilities at MDM of relevance for the IONS4SET project include:
- Advanced materials growth and processing: clean-room class 1000, two ALD systems with O3 line, two thermal and e-beam evaporators, one sputtering, photo and e-beam- lithography, rapid thermal processing and furnace annealing, wet bench for wafer cleaning.
- Thin films and surface characterization (in situ and ex situ): XPS, SEM, scanning probes tools (STM-STS, AFM, KPFM, BEEM). Optical characterization: 4.2 - 300 K: FTIR; middle- and far-IR, in situ spectroscopic ellipsometry. Structural characterization and compositional depth profiling: XRD-XRR, TXRF, ToFSIMS. Electrical characterization (4 K - 475 K): I-V, C-V, G-V, Hall effect measurement in thermal range 0.3 - 500 K; IETS: Magnetic resonance techniques (EPR, EDMR): X-band and Q-band CW-ESR and EDMR in the thermal range 0.3 - 600 K.

Please, visit our websites:
- CNR-IMM Agrate Brianza

Contact: Prof. Marco Fanciulli, Tel.: +39 039 603 6253 (CNR), +39 02 6448 5034 (UniMIB), email:

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